ES-4 Precision Elevator Stage is designed for short travel, compact vertical Z-axis applications requiring extremely fine incremental up-down motions with high resolution, high repeatability, and high mechanical stability.
Es-4 Stages are designed with high density cross-roller guides for both the vertical guide and the wedge drive to assure maximum stability within the smallest footprint. Single column vertical cross roller guides offer high stiffness with appropriate levels of preload create a unit with very low hysteresis and considerable loading capacity. The design is fully metric and modular in style. The wedge drive mechanism is separate from the elevator mechanism permitting various combinations of wedge angle, drive screw lead, and linear/rotary encoder options. This adaptable design allows the elevator stage to be configured to match the application exactly.
Primary applications of the elevator stage include short travel, compact vertical positioning in optical systems, video metrology, laser work, inspection, semiconductor testing and manufacturing processes, and similar applications where compact size is a priority. The modularity of the design permits the ES-4 Stage to be easily integrated into existing stage systems, including open frame metrology stages, or to be used as a stand alone stage. The stage is easily interfaced, both mechanically and electrically, with standard BSM40 servo motor face connection interface.
|Travel Length||4 mm|
|Accuracy||± 1 μm F.T.|
|Straightness/Flatness||± 1 μm F.T.|
|Drive System||Brushless Servo Motor - Screw Driven Wedge|
|Maximum Acceleration||Payload Dependant|
|Maximum Speed||Unladen 20 mm/s|
|Recommended Maximum Load||10 kg|
|Feedback||Non-Contact Linear Encoder System|
|Repeatability||< 1 μm|
|Construction||Aluminum Alloy Body, Hard Coat Anodize|