ES-200

Elevator Stage ES-200 is designed for vertical Z-axis applications requiring extremely fine incremental up-down motions. The ES-200 offers high resolution, high repeatability and high mechanical stability. The dual column guide and the patented single plane wedge drive achieve exceptional narrow bandwidth trajectory.

  • Apertured Z-axis stage with nanometer performance
  • Very low hysteresis drive mechanism
  • High Payload to 15 kg
  • Non-back driving single plane wedge drive
  • Optional intergrated rotary axis.
Other Screw Driven Stages

ES-200 Features & Benefits

ES-200 Stages designed with high density cross-roller guides for both the vertical guide and the wedge drive to assure maximum stability within the smallest footprint.  Dual-column vertical X-roller guides offer high stiffness with appropriate levels of preload create a unit with very low hysteresis and considerable loading capacity. The design is fully metric and modular in style. The wedge drive mechanism is separate from the elevator mechanism permitting various combinations of wedge angle, rotary or linear motor drives, and linear/rotary encoder options. This modular adaptable design allows the elevator stage to be configured to match the application exactly.

Applications

Primary applications of the elevator stage include: vertical positioning in optical systems to achieve perfect focal plane alignment, video systems, video metrology, laser work, inspection, semiconductor testing and manufacturing processes, and similar applications where precise and repeatable vertical motion is essential. The modularity of the design permits the ES-200 Stage to be easily integrated into existing stage systems, including open frame metrology stages, or to be used as a standalone stage. The stability of the Z-axis design also permits this stage to be a carrier stage for X/Y and Theta translation and positioning systems. The stage is easily interfaced, both mechanically and electrically, with BSM60 motor face connection or other motor interfaces.

Discuss your needs with a Nutec Engineer

ES-200 Specifications

Model ES-200-10 ES-200-16
Travel Length 10 mm 16 mm
Trajectory Control
Accuracy
Standard (SP) ± 1 µm F.T. ± 1 µm F.T.
High Precision (HP) ± 0.5 µm F.T. ± 0.5 µm F.T.
Straightness/Flatness
Standard (SP) ± 1 µm F.T. ± 1 µm F.T.
High Precision (HP) ± 0.5 µm F.T. ± 0.5 µm F.T.
Integrated Rotary Stage Option
Resolution 0.9 arc sec
9.0 arc sec
0.9 arc sec
9.0 arc sec

ES-200-SP
Drive System BSM60 Servo Motor
Maximum Acceleration Payload Dependant
Max Speed Unladen 10 mm/s
Recommended Payload Limit 15 kg
Feedback Non-Contact Linear Encoder
Resolution 50 nm
Repeatability < 1 μm
Construction Aluminum Alloy Body, Hard Coat Anodize

Notes

  • All trajectory data based on stage uniformly supported over full contact interface on precision mounting surface with vibration isolation
  • Payload capacities are recommended values to achieve maximum lifetime in the worst-case scenario featuring maximum dynamic operation and off-center loading
  • Force, acceleration and speed performance are based on operations with NUTEC digital servo controls.

About Us

NUTEC Mechatronic Systems' positioning is based on perfection. Engineering and design are focused on details and balanced design, flawless fabrication and precision machining to exacting standards and consistent quality.

Nutec Components
631-242-1225
[email protected]
81 Jefryn Boulevard East
Deer Park, NY 11729

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  1. Monday-Friday: 7:30am to 4:00pm
  2. Weekends: Closed

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