METROSTAGE

METROSTAGE Linear X-Y table series are high precision stages designed as an integral X/Y compound table for precise positioning. METROSTAGE is available with either solid top or in an open frame configuration.

  • Precision X-Y table with low-profile 3 tier construction
  • Linear Servo or Ballscrew Drive System
  • Integrated non-contacting positioning encoders
  • Resolution down to 1 nanometer
  • Integrally pre-loaded roller guide system
  • Available with integrated servo control
Other Multi-axis

METROSTAGE Features & Benefits

This stage structure is a three-piece construction, which has been designed for minimum distortion and highest precision  stage geometry. Stiffness and stability have been maximized to achieve the highest support and integrity. The backlash-free pre-loaded guide system achieves smooth, low-friction, precision motion for highly accurate positioning and trouble free long-term performance.

Applications

The METROSTAGE Series has a very wide range of application, because of adaptable and configurations and execution, offering many different motion platforms with different characteristics. Many applications are found in the metrology and fabrication fields, where a precise, compact X/Y motion platform is desirable. Other typical applications are found in semiconductor assembly, testing, and fabrication areas, video inspection, micro-machining, laser machining, high-speed fabrication, laser and inspection work. Many customers utilize the stage with manual turn knobs, because of the insufficient precision performance of conventional microscope stages.

METROSTAGE Configurations

· Travels from 100mm x 100mm to 300 mm x 300mm

· Stage height as low as 60 mm

· Open Frame or Solid Top

· Clean Room Compatible

· Vacuum Compatible

· Non-Magnetic

METROSTAGE Guide Systems

· Cross Roller

· Quad-Vee Lock Needle

· Hybrid Guide Bearings

METROSTAGE Drive Systems

· Precision ground ball screw

· Linear Motor iron core/ironless

· Ceramic Servo Motor

METROSTAGE Position Feedback Systems

· Rotary Encoders

· Linear Encoders

· Laser Scale Encoders

Discuss your needs with a Nutec Engineer

METROSTAGE Specifications

MS-100 ST MS150-ST MS200-ST MS300-ST MS-OFT
Travel Length (mm) 100x 100 150x 150 200×200 300×300 100×150
Trajectory Control
Accuracy
Standard Precision SP ± 7.5µm ± 10µm ± 15µm ± 20µm ± 15µ/m
High Precision HP ± 5µm ± 7.5µm ± 10µm ± 10µm n/a
Extra High Precision  XHP ± 3µm ± 4µm ± 6µm ± 6µm n/a
Straightness/Flatness
Standard SP ± 8 µm ± 10 µm ± 12 µm ± 20 µm ± 20 µm
High Precision HP ± 3µm ± 4 µm ± 6 µm ±  10 µm n/a
Extra High Precision XHP ± 3µm ± 4 µm ± 5 µm ± 7 µm n/a
Yaw/Pitch/Roll
Standard SP 20 arc-sec 20 arc-sec 20 arc-sec 20 arc-sec 30 arc-sec
High Precision HP 10 arc-sec 10 arc-sec 10 arc-sec 10u arc-sec n/a
2 axis system all
Orthogonality
Standard SP 10 arc-sec 10 arc-sec 10 arc-sec 10 arc-sec 20 arc-sec
High Precision HP 5 arc-sec 5 arc-sec 5 arc-sec 5 arc-sec 10 arc-sec
Extra High Precision XHP 3 arc-sec 3 arc-sec 3 arc-sec 3 arc-sec na
MS-SP
Travel Length (mm) 100 x 100, 150 x 150, 200 x200, 300 x 300
Drive System Step motor, Servo motor, Linear Servo Motor, Ceramic Servo Motor
Maximum Acceleration Payload Dependent
Maximum Speed Linear Motor Drive 500 mm/s Ball Screw 250 mm/s
Maximum Peak Force To match application
Maximum Continuous Force To match application
Recommended Maximum Load
L1 Parallel to base 15 kg
L2 Tension 15 kg Perpendicular to base
L3 Compression 15 kg Perpendicular to base
Feedback Non-Contact LinearEncoder System
Sinusoidal Output 1V(P-P) 20 micrometers/cycle 4096x interpolation
TTL resolution 50nm
Repeatability ≤1µm
Construction Aluminum Alloy Body Hard Coat Anodize

Notes

  • All Trajectory data based on axis supported over full length on precision mounting surface with vibration isolation
  • Payload capacities are recommended values to achieve maximum lifetime in the worst-case scenarios featuring maximum dynamic operation and off-center loading
  • Force, acceleration and speed performance are based on operation with NUTEC MICROMATIC digital servo control

About Us

NUTEC Mechatronic Systems' positioning is based on perfection. Engineering and design are focused on details and balanced design, flawless fabrication and precision machining to exacting standards and consistent quality.

Nutec Components
631-242-1225
[email protected]
81 Jefryn Boulevard East
Deer Park, NY 11729

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Working Hours

Call us or email us for formal quotations. We can be reached during the week at these times.

  1. Monday-Friday: 7:30am to 4:00pm
  2. Weekends: Closed

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