A brushless linear servo-motor driven stage that combines very high speed and precision sub-micron positioning. This is the perfect combination for high throughput and demanding linear motion applications.
Lineax® direct drive linear motors for stage positioning exhibit advantages over conventional screw driven stages. LDirect drive systems offer excellent trajectory control. The nature of these stiff, no elastic structures enable faster settling times, higher repeatability with the fastest servo response. Free of rotating inertia, much faster acceleration and higher velocities are achievable. Wear of rotating components is eliminated increasing reliability, uptime, and extending servicing intervals each of these contributes to reducing cost of ownership. The direct drive linear motor with the high-resolution encoder allows precise velocity regulation. The linear motor and other components in Lineax can be prepared for vacuum compatibility.
Lineax-8 structural materials are high-strength aluminum alloys, all surfaces are precision machined, hard coat-anodize finished in light gray. Two precision square type guide rails with re-circulating linear bearings are guided by 2 integrally pre-loaded ball tracks on each rail. The guide system requires only standard lubrication service.
Lineax-8 guide system allows for larger payloads with ultimate stability. The high resolution encoder makes the Lineax a high accurate positioning stage with a repeatability of less than a micron.
Lineax-8 stages have a compact envelope with no motor overhang. Linear motor, encoder and cables are internal with cables terminating in connectors mounted to the stage's base. A re-circulating bearing system with precision guide rails optimized for pre-load, accuracy, speed, and acceleration ratings support the stages’ high speed, precise motion. The design of the high strength, precision machined, aluminum structure maximizes the stiffness and stability. Standard finish for aluminum components is hard-coat anodized. Special finishes like Teflon impregnated hard-coat, non-anodized, and electroless Nickel can be furnished to accommodate specific application environments. Stainless steel components are made from polished material.
A linear motor driven stage lacks the mechanical gearing advantage of a screw driven stage and therefore is more application specific. The payload directly affects the acceleration rate according to the F=m•a relationship and the ability of the stage to reach a specific speed, which may affect the cycle time or throughput.
The linear motor generates a substantial peak force when supplied the necessary current by the servo drive. The higher the current, the more heating experiences the copper coil, rising motor temperature. When the application is for precision positioning, the temperature rise has an undesirable effect of influencing accuracy because of thermal induced distortion, either short term or for the duration of operation.
|Travel Length||125 mm||250 mm||375 mm||500 mm||625 mm||750 mm|
|Standard SP||± 11 µm||± 22 µm||± 28 µm||± 32 µm||± 35 µm||± 40 µm|
|High Precision HP||± 5.5 µm||± 10 µm||± 12 µm||± 14 µm||± 16 µm||± 18 µm|
|Standard SP||± 6 µm||± 12 µm||± 12 µm||± 20 µm||± 28 µm||± 36 µm|
|High Precision HP||± 4 µm||± 6 µm||± 6 µm||± 10 µm||± 14 µm||± 18 µm|
|Standard SP||10 arc-sec||15 arc-sec||20 arc-sec||25 arc-sec||30 arc-sec||35 arc-sec|
|High Precision HP||8 arc-sec||11 arc-sec||14 arc-sec||17 arc-sec||20 arc-sec||23 arc-sec|
|Standard Precision SP||20 arc-sec||20 arc-sec||20 arc-sec||20 arc-sec||20 arc-sec||20 arc-sec|
|High Precision HP||5 arc-sec||5 arc-sec||5 arc-sec||5 arc-sec||5 arc-sec||5 arc-sec|
|Extra High Precision XHP||3 arc-sec||3 arc-sec||3 arc-sec||3 arc-sec||3 arc-sec||3 arc-sec|
|Travel Length (mm)||125-750|
|Drive System||Brushless Linear Motor|
|Maximum Acceleration||Payload Dependent|
|Maximum Speed||Unladen 3 m/s|
|Maximum Peak Force||800 N|
|Maximum Continuous Force||160 N|
|Peak / Ave Current (RMS)||26 / 4.1 A|
|Recommended Maximum Load|
|L1 Parallel to Base||50 kg|
|L2 Tension Perpendicular to base||50 kg|
|L3 Compression Perpendicular to base||25 kg|
|Feedback||Non-Contact Linear Encoder System|
|Sinusoidal Output||1 V (P-P) 20-micrometers/cycle 4096x interpolation|
|TTL resolution||5 μm, 1μm, 0.5μm, 0.25μm, 0.2μm, 100 nm & 50 nm|
|Construction||Aluminum Alloy Body, Hard Coat Anodize|