Q-Max

Product Summary

The Q-Max precision positioning stage series from NUTEC developed for maximum stiffness and high resolution. A short stroke translation stage capable of precise positioning in either vertical or horizontal orientations, while maintaining extremely tight trajectory control.

ENVELOPE » QMAX-25
ENVELOPE » QMAX-50
ENVELOPE » QMAX-100

 

Description

  • High performance stage, available with 25, 50, and 100 (1-4 in.) of travel
  • Integrated Linear Encoder Systems resolution as high as 12.5 nm/count
  • Quad-Vee Lock needle guide system with constant support geometry
  • Fine Pitch Precision roller leadscrew or ballscrew drive, pre-loaded for very low hysteresis
  • Sub-micron repeatability, excellent for Z-axis, vertical application

Q-Max Precision Positioning Stage Features & Benefits

The Q-Max Precision Positioning Stage high stiffness positioning stage offers reliable linear positioning for trajectory and position critical applications. Guided by oversized needle bearing guides, featuring a constant bearing support geometry. The Q-MAX is driven to position via 1mm lead precision ground roller leadscrewor ballscrew. The fine pitch leadscrew drive comes highly preloaded and offers low hysteresis without backdriving in vertical applications. This screw is suitable for drive by either a servo or stepper motor. The Q-Max includes digital limit/home sensors and a high-resolution linear encoder system. The Standard Q-Max is offered with an attractive gray hardcoat anodize finish or can be supplied in a clean room or vacuum preparation.

Applications

Wherever tight trajectory control is required, the Q-Max series of positioning stages meet the most demanding positioning requirements. Optical Metrology in semiconductor, flat panel and microelectronics are prime applications. Use for precision dispense and liquid extrusion dispensing in the microelectronic wafer fabrication industry. In the photonic instrument field, wherever position adjustment is critical for example the focus adjustment of fast, high numerical aperture, high magnification imaging systems, Q-Max is the right choice. Q-Max is used by many brand name automatic inspection and machine vision OEM’s, Q-Max has the precision required for a range of positioning tasks including holographic inspection and high magnification imaging inspection and testing. It can be used extremely well for vertical Z-axis applications with overhanging payloads that create an offset moment loading. It is equally well suited for horizontal applications requiring high stability, low trajectory error and high resolution for long term reliable positioning.

Q-Max Specifications

 

QMX-25

QMX-50

QMX-100

Travel Length (mm)

25

50

100

Trajectory Control

 

 

 

Accuracy

 

 

 

 Standard SP

± 2.0 µm

± 3.0 µm

± 4.0 µm

High Precision HP

± 0.5 µm

± 1.0 µm

± 1.5 µm

Straightness/Flatness

 

 

 

 Standard SP

± 1.0 µm

± 2.0 µm

± 3.0 µm

High Precision HP

±0.5µm

±0.5µm

±0.5µm

Yaw/Pitch/Roll

 

 

 

 Standard SP

4 arc-sec

5 arc-sec

7.5 arc-sec

High Precision HP

2 arc-sec

2 arc-sec

3 arc-sec

Extra High Precision XHP

1.2 arc-sec

1.5 arc-sec

2 arc-sec

Resolution

 

 

 

Linear Encoder                             

Standard
Optional

50nm
consult factory

Rotary Encoder

@1mm lead
@50TPI

100nm
50.8nm

2 axis system

     

Orthogonality

 

 

 

Standard SP

20 arc-sec

20 arc-sec

20 arc-sec

High Precision HP

3 arc-sec

3 arc-sec

3 arc-sec

Extra High Precision XHP

2 arc-sec

2 arc-sec

2 arc-sec

 

QMX–SP

Travel Length 25, 50 and 100 mm
Drive System Precision Roller Lead screw or Ballscrew
Drivescrew Pitch 50mm. 50TPI
Maximum Acceleration Payload Dependent
Maximum Speed Unladen 30 mm/s
Recommended Payload limit 25 kg – 60 lbs
Feedback Non-Contact Linear
Encoder System
Repeatability ≤ 100 nm

QMax-25 x 25
precision positioning stage

QMax-50 CLS
precision positioning stage

QMax-50Vertical Mounting
image4671

NOTES:

  • All trajectory data based on axis uniformly supported over full length on precision mounting surface with vibration isolation.
  • Payload capacities are recommended values to achieve maximum lifetime in the worst-case scenario featuring maximum dynamic operation and off-center loading.
  • Force, acceleration and speed performance are based on operations with NUTEC ELECTRONIC controls.