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METROSTAGE

Product Summary

METROSTAGE XY compound table Series are high precision stages designed as an integral X/Y compound table for precise positioning. METROSTAGE is available with either solid top or in an open frame configuration.

ENVELOPE » MS100 STD-1
ENVELOPE » MS150-LM
ENVELOPE » MS300 STD

 

Description

  • Precision XY compound Table, with low-profile 3 tier construction
  • Linear Servo or Roller Lead screw Drive System
  • Integrated non-contacting position encoders
  • Resolution down to 1 nanometer
  • Integrally pre-loaded roller guide system
  • Available with integrated servo control

METROSTAGE XY Compound Table Features & Benefits

This stage structure is a three-piece construction, which has been designed for minimum distortion and highest precision  stage geometry. Stiffness and stability have been maximized to achieve the highest support and integrity. The backlash-free preloaded guide system achieves smooth, low-friction, precision motion for highly accurate positioning and trouble free long-term performance.

Applications

The METROSTAGE XY Compound Table Series has a very wide range of application, because of adaptable and configurations and execution, offering many different motion platforms with different characteristics. Many applications are found in the metrology and fabrication fields, where a precise, compact X/Y motion platform is desirable. Other typical applications are found in semiconductor assembly, testing, and fabrication areas, video inspection, micro-machining, laser machining, high-speed fabrication, laser and inspection work. Many customers utilize the stage with manual turn knobs, because of the insufficient precision performance of conventional microscope stages.

METROSTAGE Configurations

  • Travels from 100mm x 100mm to 300 mm x 300mm
  • Stage height as low as 60 mm
  • Open Frame or Solid Top
  • Clean Room Compatible
  • Vacuum Compatible
  • Non-Magnetic

METROSTAGE Guide Systems

  • Cross Roller
  • Quad-Vee Lock Needle
  • Hybrid Guide Bearings

METROSTAGE Drive Systems

  • Roller Lead screw
  • Linear Motor iron core/ironless
  • Ceramic Servo Motor

METROSTAGE Position Feedback Systems

  • Rotary Encoders
  • Linear Encoders
  • Laser Scale Encoders

METROSTAGE Specifications

 

MS-100 ST

MS150-ST

MS200-ST

MS300-ST

MS-OFT

Travel Length (mm)

100x 100

150x 150

200×200

300×300

100×150

Trajectory Control

 

 

 

 

 

Accuracy

 

 

 

 

 

Standard Precision SP

± 7.5µm

± 10µm

± 15µm

± 20µm

± 15µ/m

High Precision HP

± 5µm

± 7.5µm

± 10µm

± 10µm

n/a

Extra High Precision  XHP

± 3µm

± 4µm

± 6µm

± 6µm

n/a

Straightness/Flatness

 

 

 

 

 

Standard SP

± 8 µm

± 10 µm

± 12 µm

± 20 µm

± 20 µm

High Precision HP

± 3µm

± 4 µm

± 6 µm

±  10 µm

n/a

Extra High Precision XHP

± 3µm

± 4 µm

± 5 µm

± 7 µm

n/a

Yaw/Pitch/Roll

 

 

 

 

 

Standard SP

20 arc-sec

20 arc-sec

20 arc-sec

20 arc-sec

30 arc-sec

High Precision HP

10 arc-sec

10 arc-sec

10 arc-sec

10u arc-sec

n/a

2 axis system all

 

 

 

 

 

Orthogonality

 

 

 

 

 

Standard SP

10 arc-sec

10 arc-sec

10 arc-sec

10 arc-sec

20 arc-sec

High Precision HP

5 arc-sec

5 arc-sec

5 arc-sec

5 arc-sec

10 arc-sec

Extra High Precision XHP

3 arc-sec

3 arc-sec

3 arc-sec

3 arc-sec

na

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